By Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann

ISBN-10: 3540695613

ISBN-13: 9783540695615

ISBN-10: 3642089100

ISBN-13: 9783642089107

this is often the 1st complete booklet on microhotplate-based chemical sensor platforms in CMOS-technology. It covers all features of winning sensor prototyping: idea of transducer modelling, microelectronics layout issues, procedure layout matters, and matters concerning approach and machine microfabrication, packaging, and trying out. quite a few assorted hotplates for various operation stipulations is targeted and a relations of metal-oxide-covered microhotplate-based microsensor structures with expanding complexity is gifted. those structures belong to a brand new iteration of chemical microsensors and signify examples of the profitable integration of nanomaterials, microtechnology and microelectronics. The e-book presents scholars, scientists and engineers with an obtainable advent to the sector of microhotplate-based chemical sensing, with the entire important primary wisdom integrated. past that, it additionally presents unique info on all vital matters touching on advanced high-performance CMOS chemical microsensor structures; as a result it is going to even be priceless to specialists already acquainted with the field.

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CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS) by Markus Graf,Diego Barrettino,Henry P. Baltes,Andreas Hierlemann


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