By Gerhard Wachutka,Gabriele Schrag
ISBN-10: 3211224688
ISBN-13: 9783211224687
ISBN-10: 3709106257
ISBN-13: 9783709106259
The convention application integrated 7 invited plenary lectures and eighty two contributed papers for oral or poster presentation, that have been rigorously chosen out of a complete of 151 abstracts submitted from 14 international locations round the world.
Like the former conferences, SISPAD 2004 supplied a world-wide discussion board for the presentation and dialogue of contemporary advances and advancements within the theoretical description, actual modeling and numerical simulation and research of semiconductor fabrication procedures, equipment operation and method functionality. the diversity of themes lined via the convention contributions displays the actual results and technological difficulties encountered as a result of the gradually shrinking gadget dimensions and the ever-growing complexity in gadget technology.
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Simulation of Semiconductor Processes and Devices 2004 by Gerhard Wachutka,Gabriele Schrag
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